Nanomechanical Tester – KLA Instruments iMicro Nanoindenter

The KLA iMicro Nanoindenter is designed for nanoscale indentation hardness testing on a variety of materials including soft polymers, thin films and hard coatings. The optional NanoBlitz 3D feature provides material hardness, modulus and stiffness property maps.

KLA Instruments iMicro Nanoindenter
Manufacturer:                KLA Corporation
Model No.: iMicro
Year of manufacture:  2021
Year acquired:   2021
Location:  Parsons Room W126


  • InForce 1000 actuator for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
  • High-speed electronics with 100kHz data acquisition rate and 20µs time constant
  • Automated XY motion system with 2 position magnetic puck sample holder
  • High stiffness gantry with integrated vibration isolation
  • Integrated microscope with digital zoom for precise indentation targeting
  • InView software package with RunTest, ReviewData, InFocus reporting
  • NanoBlitz 3D generates 3D maps of nanomechanical properties by performing up 100,000 indents (300×300 array) at < 1s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values at a specified load for each indent in the array.
  • Tips available for use include Berkovich and Vickers

Principle Scientist: 
Shawn Banker


The Knowledge Base contains forms, instruction and training material, minutes, policies, tools and other resources to support your research efforts by topic area.

Contact Information

Shawn Banker
Parsons Hall Rm W123D
Durham, NH 03824


UNH Rates:
$48.00/hr  assisted
$5.00/hr  unassisted

Non-UNH Academic Rate:
$96.00/hr  assisted
$10.00/hr  unassisted

Industry Rate:
$150.00/hr  assisted
$100.00/hr  unassisted