Electron Microscope, Scanning - Tescan Lyra3 GMU FIB SEM

A state of the art SEM with Schottky field emission cathode in combination with gallium Focused Ion Beam (FIB) column and Gas Injection System (GIS).



Manufacturer:                Tescan
Model No.:                        Lyra3 GMU FIB SEM
Year of manufacture:  2013
Year acquired:                2014
Location:                          Parsons Room NB-17AD


  • Combined FE-SEM/FIB field emission microscope
  • High brightness Schottky emitter for high-resolution/high current/low-noise imaging
  • FIB column for site specific analysis, deposition, ablation of materials, and ion beam lithography
  • Automatic FIB cutting and signal acquiring followed by 3D reconstruction with 3D visualization
  • Standard Secondary Electron (SE), Back-Scatter Electron (BSE), and Cathodoluminescence (CL) detectors
  • In-beam SE and BSE detectors
  • Edax EDS and EBSD detectors for elemental analysis and examination of crystallographic orientation of materials
  • Ga liquid metal ion source
  • Magnification from 4X to 1,000,000X (at 1kV to 30kV)
  • Tri monitor set up with additional 60” common display

Available Accessories:

  • Gatan tensile/compression stage is available for performing dynamic material property studies with synchronized image and data acquisition. Maximum load is 2,000 Newtons

Principal scientist: Nancy Cherim

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Contact Information

W123 Parsons Hall
Durham, NH 03824
Phone: (603) 862-2790


UNH Rate: 
$75.00/hour  assisted
$31.00/hour  unassisted

Non UNH academic Rate: 
$150.00/hour  assisted
$62.00/hour   unassisted

Industry Rate:
$250.00/hour assisted
$168.00/hour unassisted